Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

Title
Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer
Authors
Keywords
-
Journal
OPTICS EXPRESS
Volume 20, Issue 1, Pages 627
Publisher
The Optical Society
Online
2011-12-23
DOI
10.1364/oe.20.000627

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