Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

This paper reports integrated tracking (horizontal) and focusing (vertical) actuators using microelectromechanical (MEMS) technology for optical storage. The design, fabrication and characterization of the integrated tracking and focusing actuators are demonstrated. The integrated tracking and focusing lens actuators that consist of springs, a lens holder and comb-drive actuators are implemented to obtain the two-dimensional tuning effect of an objective lens. A two-mask process is used to define the actuators on a silicon-on-insulator (SOI) wafer. The DC displacements and the frequency responses are characterized by applying voltage to the micro lens actuators. Displacements are experimentally characterized with +/- 24.6 mu m in tracking direction and 5.7 mu m in focusing direction. Moreover, the influences of the cross-axis coupling are measured and evaluated. This MEMS device which has a small form factor provides an excellent response time and size reduction. The minimization and integration of the lens actuators can offer low costs in assembly and expand the application area of the optical head. (C)2011 Optical Society of America