Large-displacement Micro-XY-stage with paired moving plates

An XY-stage driven by electrostatic comb drive actuators is fabricated realizing displacements of over 100 mu m for both axes. The plates are prepared in one layer of the silicon-on-insulator (SOI) wafer and the actuators are prepared in another layer. The raster scanning of the plate is realized by maintaining orthogonal x- and y-movements. The fast scanning is along the y-axis. Paired 820 x 950-mu m(2)-size media plates are driven at the mutually opposite y-directions canceling the inertial force. The static maximum displacements are 110 mu m (geometrical limit) for the x-axis and 90 mu m for the y-axis. At the resonance state, 115 mu m (geometrical limit) is obtained for the y-axis.