Properties of In-, Ga-, and Al-doped ZnO films grown by aerosol-assisted MOCVD: Influence of deposition temperature, doping level and annealing

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Title
Properties of In-, Ga-, and Al-doped ZnO films grown by aerosol-assisted MOCVD: Influence of deposition temperature, doping level and annealing
Authors
Keywords
TCO, Doped ZnO films, In-, Ga-, and Al-doping, MOCVD, Electrical properties, Optical properties
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 271, Issue -, Pages 156-164
Publisher
Elsevier BV
Online
2014-12-28
DOI
10.1016/j.surfcoat.2014.12.052

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