Properties of In-, Ga-, and Al-doped ZnO films grown by aerosol-assisted MOCVD: Influence of deposition temperature, doping level and annealing

出版年份 2015 全文链接

标题

作者

关键词

TCO, Doped ZnO films, In-, Ga-, and Al-doping, MOCVD, Electrical properties, Optical properties

出版物

Volume 271, Issue -, Pages 156-164

出版商

Elsevier BV

发表日期

2014-12-28

DOI

10.1016/j.surfcoat.2014.12.052

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