Effects of substrate temperature on properties of HfO2, HfO2:Al and HfO2:W films

出版年份 2015 全文链接

标题

作者

关键词

Film, Substrate temperature, Hydrophobicity, Hydrophilicity, Light transmission, Refractive index

出版物

Volume 271, Issue -, Pages 269-275

出版商

Elsevier BV

发表日期

2014-10-30

DOI

10.1016/j.surfcoat.2014.10.057

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