Deformation of nanostructures on polymer molds during soft UV nanoimprint lithography

Title
Deformation of nanostructures on polymer molds during soft UV nanoimprint lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 24, Pages 245307
Publisher
IOP Publishing
Online
2010-05-26
DOI
10.1088/0957-4484/21/24/245307

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