Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales

Title
Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales
Authors
Keywords
-
Journal
Nanoscale
Volume 6, Issue 15, Pages 8900-8906
Publisher
Royal Society of Chemistry (RSC)
Online
2014-05-07
DOI
10.1039/c3nr06723h

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