Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales
出版年份 2014 全文链接
标题
Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales
作者
关键词
-
出版物
Nanoscale
Volume 6, Issue 15, Pages 8900-8906
出版商
Royal Society of Chemistry (RSC)
发表日期
2014-05-07
DOI
10.1039/c3nr06723h
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