Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies
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Title
Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies
Authors
Keywords
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Journal
Nanoscale
Volume 4, Issue 15, Pages 4393
Publisher
Royal Society of Chemistry (RSC)
Online
2012-04-18
DOI
10.1039/c2nr30197k
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