Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS

Published 2007 View Full Article

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Title
Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Authors
Keywords
-
Journal
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS
Volume 56, Issue 2, Pages 388-401
Publisher
Elsevier BV
Online
2007-06-16
DOI
10.1016/j.jmps.2007.05.013

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