Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies
出版年份 2012 全文链接
标题
Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies
作者
关键词
-
出版物
Nanoscale
Volume 4, Issue 15, Pages 4393
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-04-18
DOI
10.1039/c2nr30197k
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