Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors

In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications

(2014) Javier Bartolomé et al.   APPLIED PHYSICS LETTERS

Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications

(2014) Lado Filipovic et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

On-Demand Patterning of Indium Tin Oxide Microdots by Laser-Induced Dot Transfer

(2013) Aiko Narazaki et al.   Applied Physics Express

Design and Fabrication of Si-Diaphragm, ZnO Piezoelectric Film-Based MEMS Acoustic Sensor Using SOI Wafers

(2013) Mahanth Prasad et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Fabrication and characterization of ZnO thin film for hydrogen gas sensing prepared by RF-magnetron sputtering

(2013) Husam S. Al-Salman et al.   MEASUREMENT

Spray pyrolysis of ZnO–TFTs utilizing a perfume atomizer

(2013) Marlis Ortel et al.   SOLID-STATE ELECTRONICS

Synthesis of ZnO nanorods by spray pyrolysis for H2S gas sensor

(2012) S.D. Shinde et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Transparent conducting properties of Ni doped zinc oxide thin films prepared by a facile spray pyrolysis technique using perfume atomizer

(2012) A. Bouaoud et al.   MATERIALS CHEMISTRY AND PHYSICS

Influence of Sn doping on ZnO sensing properties for ethanol and acetone

(2012) Xueda Li et al.   Materials Science & Engineering C-Materials for Biological Applications

Comparison of the gas sensing performance of SnO2 thin film and SnO2 nanowire sensors

(2012) E. Brunet et al.   SENSORS AND ACTUATORS B-CHEMICAL

Determination of the Poisson ratio of (001) and (111) oriented thin films ofIn2O3by synchrotron-based x-ray diffraction

(2011) K. H. L. Zhang et al.   PHYSICAL REVIEW B

The influence of methanol addition during the film growth of SnO2 by atmospheric pressure chemical vapor deposition

(2011) I. Volintiru et al.   THIN SOLID FILMS

CMOS Interfacing for Integrated Gas Sensors: A Review

(2010) Julian W Gardner et al.   IEEE SENSORS JOURNAL

Internal Stress and Microstructure of Zinc Oxide Films Sputter-Deposited with Carbon Dioxide Gas

(2010) Toru Ashida et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Numerical simulation of the liquid phase in SnO2 thin film deposition by sol-gel-dip-coating

(2010) Dayene M. Carvalho et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

Influence of deposition temperature on structure and morphology of nanostructured SnO2 films synthesized by pulsed laser deposition

(2010) S.K. Sinha et al.   MATERIALS LETTERS

Nanosensor Device for Breath Acetone Detection

(2010) L. Wang et al.   Sensor Letters

Metal Oxide Gas Sensors: Sensitivity and Influencing Factors

(2010) Chengxiang Wang et al.   SENSORS

Low temperature sputter deposition of SnOx:Sb films for transparent conducting oxide applications

(2010) J. Boltz et al.   SURFACE & COATINGS TECHNOLOGY

Indium oxide thin-film transistor by reactive ion beam assisted deposition

(2008) Y. Vygranenko et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE