In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications
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Title
In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 16, Pages 161909
Publisher
AIP Publishing
Online
2014-04-26
DOI
10.1063/1.4872461
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