标题
Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors
作者
关键词
-
出版物
SENSORS
Volume 15, Issue 4, Pages 7206-7227
出版商
MDPI AG
发表日期
2015-03-25
DOI
10.3390/s150407206
参考文献
相关参考文献
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