Design and fabrication of MEMS logic gates

Published 2008 View Full Article

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Title
Design and fabrication of MEMS logic gates
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 4, Pages 045001
Publisher
IOP Publishing
Online
2008-02-23
DOI
10.1088/0960-1317/18/4/045001

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