High temperature smart-cut SOI pressure sensor

Published 2009 View Full Article

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Title
High temperature smart-cut SOI pressure sensor
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 154, Issue 2, Pages 255-260
Publisher
Elsevier BV
Online
2009-03-31
DOI
10.1016/j.sna.2009.03.011

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