Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering

Published 2007 View Full Article

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Title
Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering
Authors
Keywords
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Journal
MICROELECTRONICS RELIABILITY
Volume 48, Issue 3, Pages 389-394
Publisher
Elsevier BV
Online
2007-10-24
DOI
10.1016/j.microrel.2007.08.010

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