Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering

标题
Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering
作者
关键词
-
出版物
MICROELECTRONICS RELIABILITY
Volume 48, Issue 3, Pages 389-394
出版商
Elsevier BV
发表日期
2007-10-24
DOI
10.1016/j.microrel.2007.08.010

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