Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering

Published 2009 View Full Article

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Title
Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
Authors
Keywords
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Journal
MATERIALS TRANSACTIONS
Volume 51, Issue 1, Pages 116-120
Publisher
Japan Institute of Metals
Online
2009-12-25
DOI
10.2320/matertrans.m2009183
References
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