Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering

标题
Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
作者
关键词
-
出版物
MATERIALS TRANSACTIONS
Volume 51, Issue 1, Pages 116-120
出版商
Japan Institute of Metals
发表日期
2009-12-25
DOI
10.2320/matertrans.m2009183

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