Chemical Mechanical Polishing of Glass Disk Substrates: Preliminary Experimental Investigation

Chemical Mechanical Polishing in Elastic Contact and Partial Hydrodynamic Lubrication: Modeling and Experiments

(2011) Hung-Jung Tsai et al.   MATERIALS AND MANUFACTURING PROCESSES

Planarization optimization of RF-MEMS switches with a gold membrane

(2010) C Villeneuve et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Experimental Investigations on Ice Bonded Abrasive Polishing of Copper Materials

(2010) R. Mohan et al.   MATERIALS AND MANUFACTURING PROCESSES

Prediction System of Magnetic Abrasive Finishing (MAF) on the Internal Surface of a Cylindrical Tube

(2010) Ching-Lien Hung et al.   MATERIALS AND MANUFACTURING PROCESSES

Transformation of silica fume into chemical mechanical polishing (CMP) nano-slurries for advanced semiconductor manufacturing

(2010) M.M. Rashad et al.   POWDER TECHNOLOGY

Chemical mechanical polishing of hard disk substrate with α-alumina-g-polystyrene sulfonic acid composite abrasive

(2010) Hong Lei et al.   THIN SOLID FILMS

Design of UAPEF Super Finish Module on ZDC2 Surface

(2009) P. S. Pa   MATERIALS AND MANUFACTURING PROCESSES

XPS study of CMP mechanisms of NiP coating for hard disk drive substrates

(2009) Zuqiang Qi et al.   TRIBOLOGY INTERNATIONAL

Future hard disk drive systems

(2008) Roger Wood   JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

Recent Advances in Polishing of Advanced Materials

(2008) Z. W. Zhong   MATERIALS AND MANUFACTURING PROCESSES