XPS study of CMP mechanisms of NiP coating for hard disk drive substrates

Published 2009 View Full Article

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Title
XPS study of CMP mechanisms of NiP coating for hard disk drive substrates
Authors
Keywords
-
Journal
TRIBOLOGY INTERNATIONAL
Volume 43, Issue 4, Pages 810-814
Publisher
Elsevier BV
Online
2009-11-28
DOI
10.1016/j.triboint.2009.11.007

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