Chemical mechanical polishing of hard disk substrate with α-alumina-g-polystyrene sulfonic acid composite abrasive

Published 2010 View Full Article

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Title
Chemical mechanical polishing of hard disk substrate with α-alumina-g-polystyrene sulfonic acid composite abrasive
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 14, Pages 3792-3796
Publisher
Elsevier BV
Online
2010-01-15
DOI
10.1016/j.tsf.2010.01.003

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