Low-Temperature Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3 Thin Films

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Title
Low-Temperature Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3 Thin Films
Authors
Keywords
-
Journal
LANGMUIR
Volume 30, Issue 47, Pages 14195-14203
Publisher
American Chemical Society (ACS)
Online
2014-11-19
DOI
10.1021/la503406v

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