Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide

Published 2010 View Full Article

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Title
Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
Authors
Keywords
-
Journal
LANGMUIR
Volume 26, Issue 17, Pages 13732-13735
Publisher
American Chemical Society (ACS)
Online
2010-07-21
DOI
10.1021/la101485a

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