Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide

标题
Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
作者
关键词
-
出版物
LANGMUIR
Volume 26, Issue 17, Pages 13732-13735
出版商
American Chemical Society (ACS)
发表日期
2010-07-21
DOI
10.1021/la101485a

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