Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

Published 2008 View Full Article

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Title
Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist
Authors
Keywords
-
Journal
ELECTRONICS LETTERS
Volume 44, Issue 2, Pages 115
Publisher
Institution of Engineering and Technology (IET)
Online
2008-01-19
DOI
10.1049/el:20082985

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