Material dependence of argon cluster ion sputter yield in polymers: Method and measurements of relative sputter yields for 19 polymers

Title
Material dependence of argon cluster ion sputter yield in polymers: Method and measurements of relative sputter yields for 19 polymers
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 2, Pages 020605
Publisher
American Vacuum Society
Online
2013-02-12
DOI
10.1116/1.4791669

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