Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

标题
Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 01A142
出版商
American Vacuum Society
发表日期
2011-12-10
DOI
10.1116/1.3667113

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