Ultraviolet nanoimprint lithography using cyclodextrin-based porous template for pattern failure reduction

Title
Ultraviolet nanoimprint lithography using cyclodextrin-based porous template for pattern failure reduction
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 107, Issue 14, Pages 141904
Publisher
AIP Publishing
Online
2015-10-07
DOI
10.1063/1.4932647

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