4.4 Article

Self-aligned silicon ring resonator optical modulator with focused ion beam error correction

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OPTICAL SOC AMER
DOI: 10.1364/JOSAB.30.000445

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  1. European Community's Seventh Framework Programme [224312 HELIOS]
  2. EPSRC in the UK
  3. EPSRC [EP/L00044X/1, EP/F001428/2, EP/F001428/1] Funding Source: UKRI
  4. Engineering and Physical Sciences Research Council [EP/F001428/1, EP/L00044X/1, EP/F001428/2] Funding Source: researchfish

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Ring-resonator-based silicon optical modulators have tremendous potential for forming compact and power-efficient optical transmitters. In this paper we demonstrate high-speed modulation from a device based upon carrier depletion in a self-aligned pn junction. Furthermore, the role that focused ion beams can play in the error correction of silicon photonic devices is also demonstrated. (C) 2013 Optical Society of America

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