KOH based selective wet chemical etching of AlN, AlxGa1−xN, and GaN crystals: A way towards substrate removal in deep ultraviolet-light emitting diode

Title
KOH based selective wet chemical etching of AlN, AlxGa1−xN, and GaN crystals: A way towards substrate removal in deep ultraviolet-light emitting diode
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 8, Pages 082110
Publisher
AIP Publishing
Online
2015-02-27
DOI
10.1063/1.4913705

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