Surface preparation and homoepitaxial deposition of AlN on (0001)-oriented AlN substrates by metalorganic chemical vapor deposition

Published 2010 View Full Article

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Title
Surface preparation and homoepitaxial deposition of AlN on (0001)-oriented AlN substrates by metalorganic chemical vapor deposition
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 4, Pages 043510
Publisher
AIP Publishing
Online
2010-08-20
DOI
10.1063/1.3467522
References
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