Chemical and Morphological Characteristics of ALD Al2O3Thin-Film Surfaces after Immersion in pH Buffer Solutions

Title
Chemical and Morphological Characteristics of ALD Al2O3Thin-Film Surfaces after Immersion in pH Buffer Solutions
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 160, Issue 10, Pages B201-B206
Publisher
The Electrochemical Society
Online
2013-08-17
DOI
10.1149/2.060310jes

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