Chemical and Morphological Characteristics of ALD Al2O3Thin-Film Surfaces after Immersion in pH Buffer Solutions

标题
Chemical and Morphological Characteristics of ALD Al2O3Thin-Film Surfaces after Immersion in pH Buffer Solutions
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 160, Issue 10, Pages B201-B206
出版商
The Electrochemical Society
发表日期
2013-08-17
DOI
10.1149/2.060310jes

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