Structural and Electrical Characterization of Lu2O3Dielectric Layer for High Performance Analog Metal–Insulator–Metal Capacitors

High-Performance $\hbox{Ni}/\hbox{Lu}_{2}\hbox{O}_{3}/ \hbox{TaN}$ Metal–Insulator–Metal Capacitors

(2011) Somnath Mondal et al.   IEEE ELECTRON DEVICE LETTERS

A New Cost-Effective Metal–Insulator–Metal Capacitor Processed at 350 $^{\circ}\hbox{C}$ Using $ \hbox{Ni}_{2}\hbox{Si}$ Fully Silicided Amorphous Silicon Electrodes

(2011) Jung-Hsiang Lee et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

High Performance Metal-Insulator-Metal Capacitors with Er2O3 on ALD SiO2 for RF Applications

(2011) Thanh Hoa Phung et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Impact of top electrode on electrical stress reliability of metal-insulator-metal capacitor with amorphous ZrTiO4 film

(2010) Yung-Hsien Wu et al.   APPLIED PHYSICS LETTERS

Frequency Effect on Voltage Linearity of $ \hbox{ZrO}_{2}$-Based RF Metal–Insulator–Metal Capacitors

(2010) T. Bertaud et al.   IEEE ELECTRON DEVICE LETTERS

Improved Capacitance Density and Reliability of High-$ \kappa$$\hbox{Ni}/\hbox{ZrO}_{2}/\hbox{TiN}$ MIM Capacitors Using Laser-Annealing Technique

(2010) C Y Tsai et al.   IEEE ELECTRON DEVICE LETTERS

High performance metal-insulator-metal capacitor using a SrTiO3/ZrO2 bilayer

(2009) C. Jorel et al.   APPLIED PHYSICS LETTERS

Bulk and Interface effects on voltage linearity of ZrO2–SiO2 multilayered metal-insulator-metal capacitors for analog mixed-signal applications

(2009) S. D. Park et al.   APPLIED PHYSICS LETTERS

Performance Improvement of $\hbox{Sm}_{2}\hbox{O}_{3}$ MIM Capacitors by Using Plasma Treatment After Dielectric Formation

(2009) Jian-Jun Yang et al.   IEEE ELECTRON DEVICE LETTERS

High density metal-insulator-metal capacitor based on ZrO2∕Al2O3∕ZrO2 laminate dielectric

(2008) Yung-Hsien Wu et al.   APPLIED PHYSICS LETTERS

Improvement of the Performance of TiHfO MIM Capacitors by Using a Dual Plasma Treatment of the Lower Electrode

(2008) C. H. Cheng et al.   IEEE ELECTRON DEVICE LETTERS