Impact of top electrode on electrical stress reliability of metal-insulator-metal capacitor with amorphous ZrTiO4 film

Metal-insulator-metal capacitor with high capacitance density and low leakage current using ZrTiO4 film

(2009) Yung-Hsien Wu et al.   APPLIED PHYSICS LETTERS

High-Performance MIM Capacitors Using HfLaO-Based Dielectrics

(2009) Lu Zhang et al.   IEEE ELECTRON DEVICE LETTERS

High performance TaYOx-based MIM capacitors

(2009) C. Mahata et al.   MICROELECTRONIC ENGINEERING

High density metal-insulator-metal capacitor based on ZrO2∕Al2O3∕ZrO2 laminate dielectric

(2008) Yung-Hsien Wu et al.   APPLIED PHYSICS LETTERS

High Density and Low Leakage Current in $ \hbox{TiO}_{2}$ MIM Capacitors Processed at 300 $^{\circ} \hbox{C}$

(2008) C. H. Cheng et al.   IEEE ELECTRON DEVICE LETTERS

Hysteresis in metal insulator semiconductor structures with high temperature annealed ZrO2/SiOx layers

(2008) Valentin K. Gueorguiev et al.   THIN SOLID FILMS