High Performance Metal-Insulator-Metal Capacitors with Er2O3 on ALD SiO2 for RF Applications

High performance metal-insulator-metal capacitor using a SrTiO3/ZrO2 bilayer

(2009) C. Jorel et al.   APPLIED PHYSICS LETTERS

Effective Modulation of Quadratic Voltage Coefficient of Capacitance in MIM Capacitors Using $\hbox{Sm}_{2}\hbox{O}_{3}/\hbox{SiO}_{2}$ Dielectric Stack

(2009) Jian-Jun Yang et al.   IEEE ELECTRON DEVICE LETTERS

Performance Improvement of $\hbox{Sm}_{2}\hbox{O}_{3}$ MIM Capacitors by Using Plasma Treatment After Dielectric Formation

(2009) Jian-Jun Yang et al.   IEEE ELECTRON DEVICE LETTERS

High-Performance MIM Capacitors Using HfLaO-Based Dielectrics

(2009) Lu Zhang et al.   IEEE ELECTRON DEVICE LETTERS

Physical and Electrical Characterization of Metal–Insulator–Metal Capacitors With $\hbox{Sm}_{2}\hbox{O}_{3}$ and $\hbox{Sm}_{2}\hbox{O}_{3}/\hbox{SiO}_{2}$ Laminated Dielectrics for Analog Circuit Applications

(2009) Jing-De Chen et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

High performance TaYOx-based MIM capacitors

(2009) C. Mahata et al.   MICROELECTRONIC ENGINEERING