Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films

Title
Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 4, Pages G92
Publisher
The Electrochemical Society
Online
2011-03-04
DOI
10.1149/1.3552616

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