Fabrication of GaAs-on-Insulator via Low Temperature Wafer Bonding and Sacrificial Etching of Ge by XeF2

Published 2011 View Full Article

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Title
Fabrication of GaAs-on-Insulator via Low Temperature Wafer Bonding and Sacrificial Etching of Ge by XeF2
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 159, Issue 2, Pages H183-H190
Publisher
The Electrochemical Society
Online
2011-12-29
DOI
10.1149/2.070202jes
References
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