Free-standing AlxGa1−xAs heterostructures by gas-phase etching of germanium

Characterization of High-Pressure $\hbox{XeF}_{2}$ Vapor-Phase Silicon Etching for MEMS Processing

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Monocrystalline AlxGa1−xAs heterostructures for high-reflectivity high-Q micromechanical resonators in the megahertz regime

(2008) Garrett D. Cole et al.   APPLIED PHYSICS LETTERS

40.8% efficient inverted triple-junction solar cell with two independently metamorphic junctions

(2008) J. F. Geisz et al.   APPLIED PHYSICS LETTERS

Dry etching of SiGe alloys by xenon difluoride

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Fabrication of suspended dielectric mirror structures via xenon difluoride etching of an amorphous germanium sacrificial layer

(2008) Garrett D. Cole et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Cavity Optomechanics: Back-Action at the Mesoscale

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