Effects of UV cure on glass structure and fracture properties of nanoporous carbon-doped oxide thin films

Title
Effects of UV cure on glass structure and fracture properties of nanoporous carbon-doped oxide thin films
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 4, Pages 043513
Publisher
AIP Publishing
Online
2008-08-23
DOI
10.1063/1.2968438

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