Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application

Published 2008 View Full Article

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Title
Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 9, Pages K89
Publisher
The Electrochemical Society
Online
2008-07-23
DOI
10.1149/1.2952432

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