Deposition of Fluorine-Containing Thin Film by Atmospheric Pressure Plasma Jet and Film Surface Structural Transition

Title
Deposition of Fluorine-Containing Thin Film by Atmospheric Pressure Plasma Jet and Film Surface Structural Transition
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 12, Issue 4, Pages 362-371
Publisher
Wiley
Online
2015-03-05
DOI
10.1002/ppap.201400109

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