Deposition of Fluorocarbon Nanoclusters by Gas Aggregation Cluster Source
Published 2012 View Full Article
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Title
Deposition of Fluorocarbon Nanoclusters by Gas Aggregation Cluster Source
Authors
Keywords
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Journal
Plasma Processes and Polymers
Volume 9, Issue 4, Pages 390-397
Publisher
Wiley
Online
2012-02-14
DOI
10.1002/ppap.201100147
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