Deposition of Fluorine-Containing Thin Film by Atmospheric Pressure Plasma Jet and Film Surface Structural Transition
出版年份 2015 全文链接
标题
Deposition of Fluorine-Containing Thin Film by Atmospheric Pressure Plasma Jet and Film Surface Structural Transition
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 12, Issue 4, Pages 362-371
出版商
Wiley
发表日期
2015-03-05
DOI
10.1002/ppap.201400109
参考文献
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