Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD

Title
Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD
Authors
Keywords
-
Journal
JOURNAL OF RAMAN SPECTROSCOPY
Volume 42, Issue 3, Pages 415-421
Publisher
Wiley
Online
2010-06-16
DOI
10.1002/jrs.2711

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