Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD

标题
Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD
作者
关键词
-
出版物
JOURNAL OF RAMAN SPECTROSCOPY
Volume 42, Issue 3, Pages 415-421
出版商
Wiley
发表日期
2010-06-16
DOI
10.1002/jrs.2711

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