Influence of Si content on the structure and internal stress of the nanocomposite TiSiN coatings deposited by large area filtered arc deposition

Published 2009 View Full Article

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Title
Influence of Si content on the structure and internal stress of the nanocomposite TiSiN coatings deposited by large area filtered arc deposition
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 12, Pages 125415
Publisher
IOP Publishing
Online
2009-06-05
DOI
10.1088/0022-3727/42/12/125415
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